HI Friends, As a follow up on my previous post, I also wanted to get the following queries on processing answered - 1. The final step in my process is metallization, but the problem is that there is a step in the oxide. How can I smoothen this step ? Also, what is the maximum height of the step that will still enable me to metallize ? 2. In the final step , I also want to fill the via's with metal to contact the underlying n+ region. What is the ideal aspect ratio for this ? Is there any standard reference online or in print that can help answer such queries on fabrication? Thanks