To get the values of LS,CS, RS and Co
Measure the points Fs and Fp very accurately. Use narrow span on NWA
Measure holder capacitance Co with LCR meter at low test frequency (1-5kHz)
Then:
CS = Co{(Fp/Fs)^2 -1}
LS = 1/{[(2*pi*Fs)^2]*CS}
RS = {2*(NWA impedance)*[10^(insertion losses/20)-1]}...