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metallization question


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HI Friends,

As a follow up on my previous  post, I also wanted to get the following queries on processing answered -

1. The final step in my process is metallization, but the problem is that there is a step in the oxide. How can I smoothen this step ? Also, what is the maximum height of the step that will still enable me to metallize ?

2. In the final step , I also want to fill the via's with metal to contact the underlying n+ region. What is the ideal aspect ratio for this ?

Is there any standard reference online or in print  that can help answer such queries on fabrication?


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  • 2 weeks later...

What are you talking about?

Did you mean to post this as a response to another thread? - if so please ask a moderator to move this to the thread in question.

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