You want to measure nanohenry values for 0603 SMD? Why even bother to try? Why should the inductance value have changed since manufacture? It will not be easy to measure SMD inductors with a few tens of nanohenrys inductance. The task is virtually impossible "in-circuit," and almost impossible out of circuit with a properly calibrated test fixture. An inexpensive hand-held LCR meter, such as the
Model 879B from B&K Precision, claims to measure down to 10 nH resolution. Read all about it's specifications on
this datasheet. Or you can spend thousands of dollars more for an Agilent laboratory-grade LCR meter, such as
this one.
BTW, measuring the values of components is a piss-poor way to "troubleshoot" anything. Use diagnostic tools such as voltmeters, oscilloscopes, signal generators, logic probes, logic analyzers, whatever it takes to narrow down your search to a defective sub-system, module, circuit, and ultimately one or more components that will have failed or are out of tolerance. Only then do you need to bring out the big guns and start making measurements of component values. At that point I would just substitute known good components for suspected bad components. If that fixes the problem, you can go on to test the "bad" components to try to find out what went wrong. I have never heard of an SMD inductor failing without visible circuit board damage. By then, trying to measure the inductance is a waste of time: replace the component, repair the board, and find out why it failed.