MEMS thermopile vacuum sensors effective from 1 millitorr to 1 atm
https://www.electronics-lab.com/mems-thermopile-vacuum-sensors-effective-1-millitorr-1-atm/
The PVC3000 series of MEMS thermopile vacuum sensors from Posifa Technologies deliver a wide effective range from 1 millitorr (0.13 Pa) to 1 atm (760 torr, or 101 kPa) to eliminate the need for additional sensing technology and to lower overall solution costs. The upper effective range of traditional Pirani vacuum sensors is capped at […]